Part Description: AE RF GENERATOR
Part Number: 660-024637-026
Condition: REFURBISHED UNIT
Part Number: 660-024637-026
Condition: REFURBISHED UNIT
Product Description: The AE RF Generator (Part Number: 660-024637-026) used in semiconductor plasma etch and deposition systems to supply controlled radio-frequency power to the plasma sources that enable wafer processing.
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