Semiconductor Manufacturing Process & Consumable
- Diffusion, Quartz(Tube / Boat / Pedestal)
- CVD, SiC / Ceramic / Silicone Carbide Parts
- PVD, Ceramic / Metal / Coating
- Etch, Quartz / Ceramic / Aluminium Anodising / Glasses Parts
- Implant, Quartz / Ceramic / Aluminium Anodising / Glasses Parts
- CMP, Pad / Filter / Motor / Rotary Union

Many Types of Slit Valve
/ O-Rings

Variety of Supply New ESC

Variety of ESC Coating
/ Repair / Treatment

Provide New RF Plasma Systems


CVD, SiC | Ceramic | Silicone Carbide Parts



PVD Ceramic | Coating | Metal



Etch Metal | Ceramic | Quartz | Glasses parts
Parts Repair, Overhaul, One to One Exchange & Spare Parts Supplier
Etch Module /CVD/PVD Module/Implant Module/Photo Module/CMP Module/Diffusion Module/Wet Clean Module
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RF Plasma Systems
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Cooling Systems
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ATM/VTM Robot + Arm Set & Controller
-
Gas Systems
-
Vacuum Systems
-
Motor Systems
-
Coatings
RF Plasma Systems
Cooling Systems
ATM/VTM Robot + Arm Set & Controller
Gas Systems
Vacuum Systems
Motor Systems
Coatings
-
RF Plasma Systems
-
Cooling Systems
-
ATM/VTM Robot + Arm Set & Controller
-
Gas Systems
-
Vacuum Systems
-
Motor Systems
-
Coatings
RF Plasma Systems
Cooling Systems
ATM/VTM Robot + Arm Set & Controller
Gas Systems
Vacuum Systems
Motor Systems
Coatings





AE RFDS 1250 | Halo 1250 Generator | RPS Generator




RF Bottom Match | Smart Match | T-Match | ONEBOX


RF Matching Unit



Axcelis GSD Implanter Disks,Transformer & PC | Axcelis GSD 200 | Axcelis Manipulator



EDWARDS TCU 40/80 Chiller | Noah Chiller & Controller | NESLAB Chiller



Thermal Chiller | Universal Chiller | Thermo Chiller



MAG 7 Robot | ATM Robot & Controller



ATR-7 Robot | TTJ20 Kawasaki Robot | Cymechs Robot



Mass Flow Controller(MFC)



Filter | Fitting



Hand Valve | Regulator | Digital Gauge




LAM V6 VCE Elevator | Turbo Pum & Controller

Vacuum Foreline Resistance Coating

Chemical Resistance Coating




CMP Rotary Union | Novellus Rotary Union | Kollmorgen Motor | AGV Arm Motor
Mobile





AE RFDS 1250 | Halo 1250 Generator | RPS Generator




RF Bottom Match | Smart Match | T-Match | ONEBOX


RF Matching Unit



Axcelis GSD Implanter Disks,Transformer & PC | Axcelis GSD 200 | Axcelis Manipulator



EDWARDS TCU 40/80 Chiller | Noah Chiller & Controller | NESLAB Chiller



Thermal Chiller | Universal Chiller | Thermo Chiller



MAG 7 Robot | ATM Robot & Controller



ATR-7 Robot | TTJ20 Kawasaki Robot | Cymechs Robot



Mass Flow Controller(MFC)



Filter | Fitting



Hand Valve | Regulator | Digital Gauge




LAM V6 VCE Elevator | Turbo Pum & Controller




CMP Rotary Union | Novellus Rotary Union | Kollmorgen Motor | AGV Arm Motor

Vacuum Foreline Resistance Coating
