Part Description: VAT PM-5 ADAPTIVE PRESSURE CONTROLLER
Part Number: 641PM-16PM-1009
Condition: REFURBISHED UNIT
Part Number: 641PM-16PM-1009
Condition: REFURBISHED UNIT
Product Description: The VAT PM-5 ADAPTIVE PRESSURE CONTROLLER (Part Number: 641PM-16PM-1009) used in semiconductor equipment to regulate vacuum chamber pressure by controlling throttle gate valves.
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