Part Description: LAM Research Electrostatic Chuck (ESC) Power Supply
Part Number: 853-025054-018
Condition: REFURBISHED
Part Number: 853-025054-018
Condition: REFURBISHED
Product Description: The LAM Research Electrostatic Chuck (ESC) Power Supply (PN: 853-025054-018) is used in LAM Research etchers, this unit generates and controls high voltage for the electrostatic chuck, securely holding wafers with precise positioning and temperature control—critical for advanced semiconductor manufacturing.
[REPAIR SERVICE AVAILABLE]





