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MKS TYPE 649, MASS FLOW PRESSURE CONTROLLER (PN: 649A-16160)
MKS TYPE 649, MASS FLOW PRESSURE CONTROLLER (PN: 649A-16160) - Image 2
MKS TYPE 649, MASS FLOW PRESSURE CONTROLLER (PN: 649A-16160) - Image 3

MKS TYPE 649, MASS FLOW PRESSURE CONTROLLER (PN: 649A-16160)

The MKS Type 649, Mass Flow Pressure Controller (PN: 649A-16160) is a compact, integrated unit combining a Baratron® manometer, mass flow meter, and control valve. Ideal for backside wafer cooling (BWCS) and process pressure regulation, it offers high accuracy (10–1000 Torr), stable control, and gas flow monitoring—reducing system size and complexity.

[REPAIR SERVICE AVAILABLE]

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Part Description: MKS TYPE 649, MASS FLOW PRESSURE CONTROLLER 
Part Number: 649A-16160
Condition: NEW

Product Description: The MKS Type 649, Mass Flow Pressure Controller (PN: 649A-16160) is a compact, integrated unit combining a Baratron® manometer, mass flow meter, and control valve. Ideal for backside wafer cooling (BWCS) and process pressure regulation, it offers high accuracy (10–1000 Torr), stable control, and gas flow monitoring—reducing system size and complexity.

[REPAIR SERVICE AVAILABLE]

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